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Patent # Description
US-9,601,330 Plasma processing device, and plasma processing method
To provide a plasma processing device and a plasma processing method capable of generating plasma stably and efficiently and processing the entire desired...
US-9,601,329 Method of fabricating crystalline island on substrate
Certain electronic applications, such as OLED display back panels, require small islands of high-quality semiconductor material distributed over a large area....
US-9,601,328 Growing a III-V layer on silicon using aligned nano-scale patterns
A method of forming an integrated circuit structure includes providing a wafer having a silicon substrate; forming a plurality of shallow trench isolation (STI)...
US-9,601,327 High-power electronic device packages and methods
A high power electronic device package constructed to include a high power electronic device having an epitaxial surface attached to a thermally conductive...
US-9,601,326 Method of manufacturing semiconductor device, including film having uniform thickness
A method of manufacturing a semiconductor device is provided which includes a step of performing a cycle, a predetermined number of times, to form a film on a...
US-9,601,325 Aromatic resins for underlayers
Aromatic resin polymers and compositions containing them are useful as underlayers in semiconductor manufacturing processes.
US-9,601,324 Method of making wafer assembly
A method including bonding a process wafer having integrated circuits and a carrier wafer having at least one alignment mark to form a wafer assembly. The...
US-9,601,323 Ion transport apparatus and mass spectrometer using the same
Within an intermediate vacuum chamber next to an ionization chamber maintained at atmospheric pressure, an electrode group of a radio-frequency carpet composed...
US-9,601,322 Mass spectrometer
A product ion spectrum is created on the basis of MS.sup.2 analysis data respectively obtained for a parent compound and a metabolite. Additionally, a neutral...
US-9,601,321 Mass spectrometer and method
A measurement state in a mass spectrometer device is determined so that the measurement method for the next round of measurement can be automatically...
US-9,601,320 Method for stabilizing a plasma and an improved ionization chamber
A method for stabilizing a plasma is disclosed. The method includes (a) providing in an ionization chamber a number of high voltage wires and a gas suitable for...
US-9,601,319 Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based process
A method for operating a substrate processing chamber includes after performing a process using a fluorine-based gas in the substrate processing chamber: a)...
US-9,601,318 Plasma processing method and plasma processing apparatus
A plasma processing method is provided. In the method, a distribution of an amount of processing within a surface of a substrate by a plasma process performed...
US-9,601,317 Cold plasma sanitizing device
A cold plasma jet hand sanitizer and method of use are provided. A pair of opposing two-dimensional arrays of atmospheric pressure cold plasma jets is used to...
US-9,601,316 Ignition apparatus for arc sources
The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition...
US-9,601,315 Multiple charged particle beam lithography apparatus and multiple charged particle beam pattern writing method
A multiple charged particle beam lithography apparatus includes a weighting coefficient operation unit to operate a plurality of weighting coefficients that...
US-9,601,314 Ion implantation apparatus and ion implantation method
An ion implantation method in which an ion beam is scanned in a beam scanning direction and a wafer is mechanically scanned in a direction perpendicular to the...
US-9,601,313 Automated TEM sample preparation
Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron...
US-9,601,312 Source for selectively providing positively or negatively charged particles for a focusing column
A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations....
US-9,601,311 Laser SDE effect compensation by adaptive tuning
Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam...
US-9,601,310 Charged particle microscope with barometric pressure correction
A method of mitigating the effects of environmental pressure variation while using a charged particle microscope is described. The charged particle microscope...
US-9,601,309 Microscopy imaging method and system
Generally, the present disclosure provides a method and system for improving imaging efficiency for CPB systems while maintaining or improving imaging accuracy...
US-9,601,308 Spectroscopic element and charged particle beam device using the same
To analyze an element to be evaluated with high sensitivity and high accuracy in a short period of time, in an electron beam analyzer including a wavelength...
US-9,601,307 Charged particle radiation apparatus
The present invention provides a high-throughput scanning electron microscope in which a wafer (9) is held by an electrostatic chuck (10), an image is obtained...
US-9,601,306 Sample micromotion mechanism, method of using the same, and charged particle device
A sample micromotion mechanism adapted to minimize an influence of a disturbance and adjust a sample drift rapidly and with high accuracy, and designed so as to...
US-9,601,305 Specimen sample holder for workpiece transport apparatus
An electron microscope specimen sample holder including a thin sheet base member with a first surface and an opposing second surface, the first surface defining...
US-9,601,304 Aberration correction apparatus, device having the same, and method for correcting aberration of charged particles
According to embodiments of the present invention, an aberration correction apparatus is provided. The aberration correction apparatus includes an aberration...
US-9,601,303 Charged particle beam device and method for inspecting and/or imaging a sample
A charged particle beam device for imaging and/or inspecting a sample is described. The charged particle beam device includes a beam emitter for emitting a...
US-9,601,302 Inspection apparatus
An inspection apparatus capable of facilitating reduction in cost of the apparatus is provided. The inspection apparatus includes: beam generation means for...
US-9,601,301 Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment
A direct (DC) voltage is applied to an electrode at a voltage value to clamp a workpiece to an electrostatic chuck in a processing chamber. The electrode is...
US-9,601,300 Cathode element for a microfocus x-ray tube
A cathode element for a microfocus x-ray tube includes a heatable filament formed of a wire for thermionic emission of electrons for generating an electron...
US-9,601,299 Photocathode including silicon substrate with boron layer
A photocathode is formed on a monocrystalline silicon substrate having opposing illuminated (top) and output (bottom) surfaces. To prevent oxidation of the...
US-9,601,298 Electron gun supporting member and electron gun apparatus
An electron gun supporting member includes an insulating supporting member configured such that its one end is connected to a predetermined member having a...
US-9,601,297 High voltage compact fuse assembly with magnetic arc deflection
Fuse assemblies in the form of fuse blocks and fuse holders include embedded permanent magnet arc suppression features that facilitate higher voltage operation...
US-9,601,296 Low tripping level circuit breakers, tripping units, and methods
Embodiments provide a circuit breaker having a relatively low instantaneous current level at tripping. The circuit breaker includes a tripping mechanism coupled...
US-9,601,295 Breaker tripping mechanisms, circuit breakers, systems, and methods of using same
Embodiments provide tripping unit of a circuit breaker. The tripping unit includes a magnet, a bimetal member extending alongside of the magnet, and an armature...
US-9,601,294 Fuse unit
In a fuse unit that includes a bus bar whose bend parts separated from each other are arranged in parallel, and one pair of divided bodies formed by being...
US-9,601,293 Temperature switch
A base member includes a terminal fixing part for blocking an entire surface of an opening part of a housing at a position further inner than an opening end...
US-9,601,292 Dual stroke mechanically latched mechanism
A switch for an electrical circuit includes a base, a rotatable cam having a first profile and a second profile, a solenoid, a link, and a member comprising a...
US-9,601,291 Actuator for circuit breaker and method for manufacturing the same
The present disclosure may fix the second yoke without using an upper cover and a lower cover, thereby having an effect of simplifying the entire structure, and...
US-9,601,290 Switching device with several regions of connection
An electromagnetic switching device, with several distinct regions (10, 20, 30, 40), where each region separates and places the terminals and the connection...
US-9,601,289 Ground fault circuit interrupter
A ground fault circuit interrupter includes a reset key, a reset mechanism, a conductive assembly configured to connect a power supply input side to a load...
US-9,601,288 Apparatus for floor cleaning, with improved key
Apparatus for floor cleaning, having a cavity that opens on the dashboard, a plurality of mechanically similar interchangeable keys, and suitable to be inserted...
US-9,601,286 Assembly of a handheld electronic device
Several mechanical features of an electronic device are provided. In some embodiments, the electronic device may include a bezel coupled to a housing. The bezel...
US-9,601,285 Method and apparatus pertaining to keycap light guides
An apparatus (such as a keyboard) has a plurality of keycaps and a corresponding light guide film disposed on the underside of those keycaps. The light guide...
US-9,601,284 Hybrid relay
A relay (1) includes a motor (20) and a primary electrical switch assembly (132). Primary electrical switching attachment points (113) are switched by a...
US-9,601,283 Efficient IGBT switching
Embodiments of the invention provide IGBT circuit modules with increased efficiencies. These efficiencies can be realized in a number of ways. In some...
US-9,601,282 Power shut-off unit
The power shut-off unit is equipped with two relays (2) connected to an external circuit, and a tabular baseplate (6). Multiple auxiliary electronic components...
US-9,601,281 Multiphase circuit breaker system having a short-circuit link
The circuit breaker system contains a plurality of phase conductors, a circuit breaker having a plurality of breaker poles, and a short-circuit link having a...
US-9,601,280 Micro electromagnetically actuated latched switches
Micro-electromagnetically actuated latched miniature relay switches formed from laminate layers comprising a spring and magnet, electromagnetic coils, magnetic...
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