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Patent # Description
US-9,666,468 Tray for a wafer with tape frame
A tray for storing a wafer with a tape frame in a storage container includes a ring-shaped frame, a dicing tape and a semiconductor wafer. The dicing tape is...
US-9,666,467 Detachable high-temperature electrostatic chuck assembly
A detachable high-temperature electrostatic chuck assembly including a chuck body for supporting a substrate, an interface plate coupled to the chuck body by a...
US-9,666,465 Positioning apparatus
Provided herein is an apparatus including a loader configured to position a workpiece in a holding fixture. In some embodiments, the holding fixture includes an...
US-9,666,459 Apparatus for processing wafers
A wafer processing apparatus includes a reaction tube extending in a vertical direction, a door plate positioned under the reaction tube to seal the reaction...
US-9,666,457 Adsorption device for rotatable heating
An adsorption device for rotatable heating is provided with an adsorption heating plate, a support needle driving device, a rotary sliding ring, and a turning...
US-9,666,456 Method and apparatus for treating a workpiece with arrays of nozzles
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids,...
US-9,666,455 Substrate cleaning apparatus
A substrate cleaning apparatus cleans a surface of a substrate such as a semiconductor wafer and dries the substrate. The substrate cleaning apparatus includes...
US-9,666,454 Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same
A wafer storage apparatus includes a wafer stacking portion that encloses an internal space with an open front side for receiving a plurality of wafers; a rear...
US-9,666,453 Semiconductor package and a substrate for packaging
A semiconductor package is provided, which includes: a substrate having a metal pattern layer; a semiconductor die formed on the substrate; and an underfill...
US-9,666,452 Chip packages and methods for manufacturing a chip package
A method for manufacturing a chip package is provided. The method including: holding a carrier including a plurality of dies; forming a separation between the...
US-9,666,451 Self-aligned via and plug patterning for back end of line (BEOL) interconnects
Self-aligned via and plug patterning for back end of line (BEOL) interconnects is described. In an example, an interconnect structure for an integrated circuit...
US-9,666,448 Methods of forming patterns
A method of forming patterns includes forming an array of pillars on an underlying layer stacked on an etch target layer, forming a separation wall layer on the...
US-9,666,447 Method for selectivity enhancement during dry plasma etching
A method of etching a layer on a substrate is described. The method includes disposing a substrate having a heterogeneous layer composed of a first material and...
US-9,666,446 Etching method
An etching method includes generating a plasma from a hydrogen-containing gas and a fluorine-containing gas with high-frequency electric power for plasma...
US-9,666,445 Manufacturing method of semiconductor device
In order to provide a semiconductor device with high reliability while manufacturing cost is being suppressed, dry etching for an insulating film is performed...
US-9,666,443 Methods for providing lithography features on a substrate by self-assembly of block copolymers
Causing a self-assemblable block copolymer (BCP) having first and second blocks to migrate from a region surrounding a lithography recess of the substrate and a...
US-9,666,442 Methods for single exposure--self-aligned double, triple, and quadruple patterning
A method including forming a pattern on a surface of a substrate, the pattern including one of discrete structures including at least one sidewall defining an...
US-9,666,441 Semiconductor device and method of manufacture
A semiconductor device and method of manufacturing are presented in which features of reduced size are formed using an irradiated mask material. In an...
US-9,666,440 Polishing apparatus and polishing method
A polishing apparatus 100 includes a holding stage 4 that holds a central portion of a back surface of a substrate W, a motor M1 that rotates the holding stage...
US-9,666,439 Method of manufacturing a semiconductor device and recording medium
A method of manufacturing a semiconductor device includes forming a seed layer containing a metal element on a substrate by performing a first process and a...
US-9,666,438 Semiconductor device and formation thereof
A semiconductor device and method of formation are provided. The semiconductor device comprises a metal plug in a first opening over a substrate. The metal plug...
US-9,666,437 Method for manufacturing semiconductor device
A method for manufacturing a semiconductor device including a semiconductor chip having a front surface electrode and a rear surface electrode provided on a...
US-9,666,436 Ion implantation methods
Provided are methods of forming an ion implanted region in a semiconductor device. The methods comprise: (a) providing a semiconductor substrate having a...
US-9,666,435 Apparatus and process for integrated gas blending
A system (10) for delivery of dilute fluid, utilizing an active fluid source (12), a diluent fluid source (14), a fluid flow metering device (24) for dispensing...
US-9,666,433 Methods for manufacturing a semiconductor device
Carbon-containing patterns are formed on an etch target layer, side surfaces of the carbon-containing patterns are treated by a hydrophilic process,...
US-9,666,431 Large-scale patterning of germanium quantum dots by stress transfer
Provided is a method for forming a two-dimensional array of semiconductor quantum confined structures. The method includes providing a layer that has first...
US-9,666,429 Method for growing group III nitride
A method for growing Group III nitride is provided, which includes the following steps. A plurality of notches separated from each other are formed at the...
US-9,666,424 Method and apparatus for operating a germicidal UV device with a programmable logic controller and a bluetooth...
This invention employs a programmable logic controller (computer) with a specific wireless communication protocol (BLE) to allow for remote connectivity of the...
US-9,666,423 Instruments for measuring ion size distribution and concentration
Instruments are disclosed for analyzing ions from about 1000 to 10,000,000 Daltons by controlling a gaseous medium through which the ions travel under the...
US-9,666,422 Analyzer
There is provided an analyzer including: an ionizer unit that ionizes molecules to be analyzed; a filter unit that selectively passes ions generated by the...
US-9,666,420 System and method of detection and quantification by mass spectrometry and by activating ionised molecular species
Disclosed is a system and method of mass spectrometry, including: a. ionizing an analyte to form a precursor ion (A) having a mass-to-charge ratio (m/z), in...
US-9,666,419 Image intensifier tube design for aberration correction and ion damage reduction
The disclosure is directed to image intensifier tube designs for field curvature aberration correction and ion damage reduction. In some embodiments, electrodes...
US-9,666,416 Apparatus and method for depositing electronically conductive pasting material
A method and apparatus are described for reducing particle contamination in a plasma processing chamber. In one embodiment, a pasting disk is provided which...
US-9,666,410 Charged particle beam device
Proposed is a charged particle beam device including an arithmetic processing unit that generates an image of a sample, based on a detection signal that is...
US-9,666,409 Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction...
US-9,666,408 Apparatus and method for processing sample, and charged particle radiation apparatus
In order to prevent a sample from thermally expanding and contracting when the sample is placed on a sample stage inside a vacuum chamber, the related art has...
US-9,666,407 Electrostatic quadrupole deflector for microcolumn
Disclosed is an electrostatic quadrupole deflector for a microcolumn. The deflector includes an electron beam passage hole, deflecting electrodes to which a...
US-9,666,403 Compact self-resonant X-ray source
An X-ray source, which includes a resonant cavity preferably of a cylindrical shape, is excited in a microwave mode TE.sub.11p and affected by a static and...
US-9,666,400 Field emission electron source and field emission device
A field emission electron source includes a linear carbon nanotube structure, an insulating layer and at least one conductive ring. The linear carbon nanotube...
US-9,666,399 Metal and plastic safety clip to protect against overheating in a plug or socket
An overheating destructive conductive plate safety clip as well as a plug and a socket using that conductive plate safety clip are disclosed. The overheating...
US-9,666,398 Angled plug-on neutral connectors, circuit breakers including same, panel boards incuding angled neutral bars,...
An angled plug-on neutral connector assembly of a circuit breaker. Angled plug-on neutral connector assembly includes a molded case including a bottom plane and...
US-9,666,396 Electromagnetic inductive load control device
With a relay control device according to an embodiment, a regenerative current from a relay coil which is disposed in a relay flows through a coil energy...
US-9,666,393 High voltage vertical break disconnect switch with blade position detector and rollover indicator
A blade position detector and rollover indicator is operatively attached to an elongated movable switch-blade assembly of a horizontally mounted high voltage...
US-9,666,389 Force switch
A switch comprising a switching element, a hollow body defining an interior cavity in which the switching element is movably disposed along a longitudinal...
US-9,666,388 Control panel for an appliance
A control panel for an appliance includes a tactile switch positioned on a PCB. An elastic spacer sheet is positioned over the PCB, and the tactile switch is...
US-9,666,387 Waterproof button structure
A waterproof button structure includes a housing, a button cap, a plurality of waterproof elements and a fastening member. The housing has a first surface and a...
US-9,666,386 Keyboard integrated pushbutton with multi illumination
A multi-illuminated pushbutton, including a substrate having a switch and a button cap. A lighting board may be affixed to the substrate, the lighting board...
US-9,666,384 Portable actuator device and system for remotely operating electrical disconnect switches
A portable actuator system enables the remote operation of electrical disconnect switches with a portable actuator device that is temporarily installed at the...
US-9,666,381 Asymmetrical supercapacitor with alkaline electrolyte comprising a three-dimensional negative electrode and...
An asymmetrical supercapacitor including an alkaline electrolyte, at least one separator, at least one positive electrode including a nickel-based hydroxide and...
US-9,666,378 Power storage module
A plurality of power storage cells and a plurality of power storage cell holders are stacked alternately in the stacking direction. End plates are superimposed...
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