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Patent # Description
US-9,735,009 Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel
The present disclosure generally relates to methods for removing contaminants and native oxides from substrate surfaces. The method includes exposing a surface...
US-9,735,008 Use of surfactants to control island size and density
Methods of controlling island size and density on an OMVPE growth film may comprise adding a surfactant at a critical concentration level, allowing a growth...
US-9,735,007 Method of processing substrate, substrate processing apparatus, and recording medium
A method of processing a substrate includes: growing a first layer including a first element and a second element by supplying a first precursor containing the...
US-9,735,006 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
A method of manufacturing a semiconductor device is disclosed. The method includes forming a thin film containing a predetermined element, boron, carbon, and...
US-9,735,005 Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices
A method for depositing a dielectric layer that includes introducing a substrate into a process chamber of a deposition tool; and heating the substrate to a...
US-9,735,004 PVDF-TrFE co-polymer having improved ferroelectric properties, methods of making a PVDF-TrFE co-polymer having...
A method of exchanging or transforming end groups in and/or improving the ferroelectric properties of a PVDF-TrFE co-polymer is disclosed. A bulky or chemically...
US-9,735,003 Film-forming apparatus and film-forming method
A film-forming apparatus and film-forming method comprising, a chamber, a first gas supply unit supplying a reaction gas for a film-forming process to the...
US-9,735,002 Integrated apparatus for efficient removal of halogen residues from etched substrates
A method and apparatus for removing volatile residues from a substrate are provided. In one embodiment, a method for volatile residues from a substrate includes...
US-9,735,001 Ion trap with parallel bar-electrode arrays
The invention "Ion Trap Array (ITA)" pertains generally to the field of ion storage and analysis technologies, and particularly to the ion storing apparatus and...
US-9,735,000 Methods, apparatus, and system for mass spectrometry
A miniature, low cost mass spectrometer capable of unit resolution over a mass range of 10 to 50 AMU. The mass spectrometer incorporates several features that...
US-9,734,999 Gasket seal for a mass spectrometer
A gasket seal for a mass spectrometer is disclosed. The gasket seal comprises a membrane having an outer profile and an inner profile and one or more...
US-9,734,998 AC gate ion filter method and apparatus
The present invention uses an AC voltage instead of DC voltage on an ion gate to filter/selectively pass ions. The ions that pass through the AC ion gate can be...
US-9,734,997 Mass spectrometer and mass spectrometry method
The degree of ion dissociation which occurs within a first intermediate vacuum chamber (212) maintained at a comparatively low degree of vacuum depends not only...
US-9,734,996 System and method for enhancing charge-state determination in electrospray mass spectrometry
A method of mass spectrometry comprises ionizing a sample and obtaining mass spectral data relating to a plurality of ion detection events. The method then...
US-9,734,995 Time of flight quantitation using alternative characteristic ions
A method of mass spectrometry is disclosed wherein the intensity of an analyte is determined by determining the intensity of first characteristic fragment ions...
US-9,734,994 Crystalline alloy having glass-forming ability, preparation method thereof, alloy target for sputtering, and...
Provided are a crystalline alloy having significantly better thermal stability than an amorphous alloy as well as glass-forming ability, and a method of...
US-9,734,993 Semiconductor manufacturing apparatus
A semiconductor manufacturing apparatus is capable of reducing power consumption. The semiconductor manufacturing apparatus 1 includes a processing chamber 2...
US-9,734,992 Plasma processing apparatus
A plasma processing apparatus performs a stable and accurate matching operation with high reproducibility in a power modulation process of modulating of a high...
US-9,734,991 Negative ribbon ion beams from pulsed plasmas
An apparatus and method for the creation of negative ion beams is disclosed. The apparatus includes an RF ion source, having an extraction aperture. An antenna...
US-9,734,990 Plasma apparatus and substrate-processing apparatus
Provided are a plasma generating apparatus and a substrate processing apparatus. The plasma generating apparatus includes a plurality of dielectric tubes...
US-9,734,989 Method for manufacturing semiconductor device, ion beam etching device, and control device
A film thickness distribution exists in a substrate plane after CMP step. This film thickness distribution results in, for example, variation in gate threshold...
US-9,734,988 Exposure apparatus and exposure method
To form a complex and fine pattern by combining optical exposure technology and charged particle beam exposure technology, provided is an exposure apparatus...
US-9,734,987 Method and system for adaptively scanning a sample during electron beam inspection
A system for adaptive electron beam scanning may include an inspection sub-system configured to scan an electron beam across the surface of a sample. The...
US-9,734,986 Mineral identification using sequential decomposition into elements from mineral definitions
Mineral definitions each include a list of elements, each of the elements having a corresponding standard spectrum. To determine the composition of an unknown...
US-9,734,985 Analytical apparatus, sample holder and analytical method
In accordance with an embodiment, an analytical apparatus includes a member, a voltage source connected to the member and a detecting section. The member has an...
US-9,734,984 Multi-beam current quantity measuring method, multi-charged particle drawing control device, and multi-charged...
A current quantity measuring method of multi-beams irradiates with a charged particle beam, amplifies an electric signal corresponding to multi-beams passed...
US-9,734,983 Charged particle radiation apparatus
To provide a charged particle radiation apparatus including a soundproof cover that highly realizes both suppression of image defects due to a specific...
US-9,734,982 Beam current density distribution adjustment device and ion implanter
A beam current density distribution adjustment device is provided. The device includes member pairs in a long side direction of a ribbon beam, the member pairs...
US-9,734,981 Charged particle beam writing apparatus and charged particle beam writing method
A charged particle beam writing apparatus includes a circuitry to set, when a charged particle beam is deflected to move between plural small regions by a...
US-9,734,980 Graphene serving as cathode of X-ray tube and X-ray tube thereof
Graphene serving as the cathode of an X-ray tube, and a high-efficiency graphene cathode field emission X-ray tube. The graphene cathode field emission X-ray...
US-9,734,979 X-ray apparatus and a CT device having the same
The present application provides a curved surface array distributed x-ray apparatus, characterized in that, it comprises: a vacuum box which is sealed at its...
US-9,734,978 Manufacturing process
A process for producing small hollow, gas-filled shells called plasma-shells filled with an ionizable gas at a predetermined pressure for use in a gas discharge...
US-9,734,977 Image intensifier with indexed compliant anode assembly
An image intensifier and a method of fabrication are disclosed. The image intensifier contains a photocathode assembly (120) including a vacuum window to...
US-9,734,976 Array of carbon nanotube micro-tip structures
An array of carbon nanotube micro-tip structure includes an insulating substrate and a plurality of patterned carbon nanotube film structures. The insulating...
US-9,734,975 In-line fuse assembly
An embodiment of an in-line fuse holder has been disclosed. The fuse holder includes a first terminal and a second terminal configured to cooperate with the...
US-9,734,974 Low voltage circuit breaker with a control device for re-closing said low voltage circuit breaker
The present invention refers to a low voltage circuit breaker with a control device for re-closing said low voltage circuit breaker. The control device is...
US-9,734,973 Electric switching device
An electric switching device for a low voltage circuit includes an electronic unit configured to be operatively connected to a first communication bus...
US-9,734,972 Electromagnetic relay
An electromagnetic relay includes a contactor including a fixed contact and a movable contact, and an electromagnet device for moving the movable contact. The...
US-9,734,971 Battery safety device for vehicle and method of detecting failure thereof
A battery safety device for a vehicle and a method of detecting failure thereof is installed between a high-voltage battery mounted on the vehicle and a power...
US-9,734,970 Auxiliary relay of electronic contactor
Disclosed embodiments relate to an auxiliary relay of an electronic contactor. In some embodiments, an auxiliary relay has its conducting state controlled by a...
US-9,734,969 Centrifugal actuator switch with a limiter for spring movement
A centrifugal actuator switch includes a sleeve having a collar on which two protuberances are formed. Each protuberance engages a biasing member to limit...
US-9,734,968 Multifunctional selection operation switch apparatus
A multifunctional selection operation switch apparatus includes: an operation member including multiple operated portions and capable of being rotationally...
US-9,734,967 Operating panel device
An operating panel device includes an operating ring, and a display device which is disposed to face a back surface of the operating ring. The display device...
US-9,734,966 Membrane circuit board and light-emitting keyboard using the same
A light-emitting keyboard includes a membrane circuit board including a lower layer, an upper layer and a light-guiding spacer layer arranged between lower...
US-9,734,965 Arrangement of pushbutton switches with a programmable display
An arrangement of pushbutton switches with a programmable display that has a support structure with an assembly panel with openings for arranging there through...
US-9,734,964 Rubber mat keyboard, particularly a silicone mat keyboard
A data input and/or operator control system, particularly a keypad, also a POS keypad, having a lower portion and an upper portion and also at least one printed...
US-9,734,963 Apparatus, system and method for a side actuator arrangement
An apparatus and system for a side actuator arrangement as well as a substrate, and method of manufacturing, for a side actuator arrangement. The apparatus...
US-9,734,962 Key structure and keyboard having key structure
A key structure includes a carrying body, a frame body, a keycap and at least two connecting members. The frame body is disposed on the carrying body, and the...
US-9,734,961 Method of controlling an appliance door position switch for Sabbath mode operation
An appliance includes a position switch retention device for use with an appliance includes a body defining a generally cylindrical profile extending through a...
US-9,734,959 Structure of crossbar for manual motor starter
The present disclosure relates to a structure of a crossbar for a manual motor starter, and particularly, to a structure of a crossbar for a manual motor...
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