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Patent # Description
US-9,941,129 Semiconductor device having self-aligned gate contacts
A semiconductor device and a method for manufacturing the device. The method includes: depositing a first dielectric layer on a semiconductor device; forming a...
US-9,941,128 Method of lateral oxidation of NFET and PFET high-k gate stacks
A method for fabricating a semiconductor circuit includes obtaining a semiconductor structure having a gate stack of material layers including a high-k...
US-9,941,127 Semiconductor device and method of manufacturing semiconductor device
A semiconductor includes a first electrode, a first semiconductor region, a second semiconductor region, a third semiconductor region, and a gate electrode. The...
US-9,941,126 Microwave plasma device
A processing system is disclosed, having a power transmission element with an interior cavity that propagates electromagnetic energy proximate to a continuous...
US-9,941,125 Method for integrated circuit patterning
A method of patterning a substrate includes forming a hard mask layer over the substrate; forming a first material layer over the hard mask layer; and forming a...
US-9,941,124 Semiconductor device
A semiconductor device includes a semiconductor base body having a first main surface and a second main surface, the first main surface and the second main...
US-9,941,123 Post etch treatment to prevent pattern collapse
A method for etching features in a stack comprising a patterned hardmask over a carbon based mask layer is provided. A pattern is transferred from the patterned...
US-9,941,122 Methods of forming staircase-shaped connection structures of three-dimensional semiconductor devices
Provided is a staircase-shaped connection structure of a three-dimensional semiconductor device. The device includes an electrode structure on a substrate, the...
US-9,941,121 Selective dry etch for directed self assembly of block copolymers
Methods for preparing a patterned directed self-assembly layer generally include providing a substrate having a block copolymer layer including a first...
US-9,941,120 Process and system for uniformly crystallizing amorphous silicon substrate by fiber laser
The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film...
US-9,941,119 Method of forming silicon layer in manufacturing semiconductor device and recording medium
A method of manufacturing a semiconductor device includes alternately performing supplying a first process gas containing silicon and a halogen element to a...
US-9,941,118 Dense vertical nanosheet
After forming a sacrificial mandrel located over a substrate, alternating channel layer portions and sacrificial layer portions are formed on sidewalls of the...
US-9,941,117 Tunneling field effect transistors and transistor circuitry employing same
A p-channel tunneling field effect transistor (TFET) is selected from a group consisting of (i) a multi-layer structure of group IV layers and (ii) a...
US-9,941,116 Method for manufacturing silicon-carbide semiconductor element
In this method for manufacturing a semiconductor element, a modified layer produced by subjecting a substrate (70) to mechanical polishing is removed by heating...
US-9,941,115 Method for manufacturing semiconductor device
A release layer formed over a substrate; at least one of thin film integrated circuits is formed over the release layer; a film is formed over each of the at...
US-9,941,114 Organometallic precursors and methods of forming thin layers using the same
An organometallic precursor is represented by a chemical formula of Xn(M)(R1)m(R2)k. M is a central metal. X is a ligand of M and one of 6,6-dimethylfulvenyl,...
US-9,941,113 Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor...
Systems and methods are disclosed for plasma enabled film deposition on a wafer in which a plasma is generated using radiofrequency signals of multiple...
US-9,941,112 Method of manufacturing semiconductor device and semiconductor device
Provided is a method of manufacturing a semiconductor device which includes, in the following order: a first step of preparing a semiconductor element which...
US-9,941,111 Method for processing a semiconductor layer, method for processing a silicon substrate, and method for...
According to various embodiments, a method for processing a semiconductor layer may include: generating an etch plasma in a plasma chamber of a remote plasma...
US-9,941,110 Manufacturing method and fluid supply system for treating substrate
A method of manufacture and fluid supply system for treating a substrate is provided. The fluid supply system for treating a substrate may include a substrate...
US-9,941,109 Surface treatment in a chemical mechanical process
A method is presented that includes the step of polishing a wafer positioned on a platen. After polishing the wafer, the method includes initiating a high...
US-9,941,108 High dose implantation strip (HDIS) in H.sub.2 base chemistry
Plasma is generated using elemental hydrogen, a weak oxidizing agent, and a fluorine containing gas. An inert gas is introduced to the plasma downstream of the...
US-9,941,107 Cylindrical multi-reflecting time-of-flight mass spectrometer
A method and apparatus are disclosed for improving resolution and duty-cycle of a multi-reflecting TOF mass spectrometer (MR-TOF) by arranging a cylindrical...
US-9,941,106 Quadrupole robustness
An apparatus for filtering ions is disclosed comprising a separation device for separating ions temporally according to a first physico-chemical property and a...
US-9,941,105 Mass spectrometry analysis of microorganisms in samples
The invention generally relates to systems and methods for mass spectrometry analysis of microorganisms in samples.
US-9,941,104 Systems and methods for delivering liquid to an ion source
Methods and systems for delivering a liquid sample to an ion source are provided herein: In various aspects, the methods and systems described herein can...
US-9,941,103 Bias-variant photomultiplier tube
A bias-variant photomultiplier tube (PMT) includes a photocathode that when operating absorbs photons and emits photoelectrons responsive to the absorbed...
US-9,941,102 Apparatus for processing work piece by pulsed electric discharges in solid-gas plasma
Work piece processing is performed by pulsed discharges between an anode (2) and a magnetron sputtering cathode (1) in solid-gas plasmas using a chamber (2)...
US-9,941,101 Plasma processing apparatus and upper electrode assembly
A plasma processing apparatus includes supporting members, connecting members and a sliding member. Each of the supporting members is partially disposed in a...
US-9,941,100 Adjustable nozzle for plasma deposition and a method of controlling the adjustable nozzle
The description relates to an adjustable nozzle capable of pivoting about an axis of the nozzle and translating along the axis of the nozzle. A high density...
US-9,941,098 Plasma processing method
In a plasma processing method of sequentially performing multiple cycles, each of which includes plural stages which generate plasma of different processing...
US-9,941,097 Plasma processing apparatus
A plasma processing apparatus includes a processing chamber including a dielectric window; a coil-shaped RF antenna, provided outside the dielectric window; a...
US-9,941,096 Glancing angle mill
A method and system for forming a planar cross-section view for an electron microscope. The method comprises directing an ion beam from an ion source toward a...
US-9,941,095 Charged particle beam apparatus
An object of the invention is to provide a charged particle beam apparatus which can perform optimized adjustment of a focusing condition of a charged particle...
US-9,941,094 Innovative source assembly for ion beam production
A source assembly for producing an ion beam and comprising a collision ionization ion source having: A pair of stacked plates, sandwiched about an intervening...
US-9,941,093 Target processing unit
The invention relates to a target processing unit (10) comprising a vacuum chamber (30) for accommodating a target to be processed, a projection column (46)...
US-9,941,092 X-ray assemblies and coatings
The disclosed subject matter includes devices and methods relating to anode assemblies and/or X-ray assemblies. In some aspects, a method of forming an X-ray...
US-9,941,091 X-ray tube
An X-ray tube includes a cathode including an emitter emitting an electron beam, an anode at which a target material is disposed, the target material emitting...
US-9,941,090 X-ray source, high-voltage generator, electron beam gun, rotary target assembly, and rotary vacuum seal
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an...
US-9,941,089 Cesium primary ion source for secondary ion mass spectrometer
A primary ion source subassembly for use with a secondary ion mass spectrometer may include a unitary graphite ionizer tube and reservoir base. A primary ion...
US-9,941,088 Fold over emitter and collector field emission transistor
A field emission transistor includes a gate, a fold over emitter, and fold over collector. The emitter and the collector are separated from the gate by a void...
US-9,941,087 Ion source cathode shield
An ion source has an arc chamber having an arc chamber body. An electrode extends into an interior region of the arc chamber body, and a cathode shield has a...
US-9,941,086 Electrical component unit, fusible link unit, and fixing structure
Provided is a fusible link unit (electrical component unit) including a fusible link (electrical component), a battery terminal fixed to an electrode post...
US-9,941,085 Electrical switching apparatus, and movable arm assembly and movable arm therefor
A movable arm is for a movable arm assembly of an electrical switching apparatus. The movable arm assembly includes a first separable contact. The electrical...
US-9,941,084 Switching devices for medical apparatuses and related systems and methods
In some aspects, a switching device for a medical apparatus includes a first switching member adapted to select an assigned operating function of the medical...
US-9,941,083 Pressure switch
A pressure switch is disclosed. The pressure switch includes a housing and a pressure-receiving chamber that communicates with a duct to which an operating...
US-9,941,082 Float switch assembly
A float switch assembly for detecting fluid levels in a reservoir such as in a Christmas tree stand. When the fluid level drops below a predetermined point, the...
US-9,941,080 Self-deicing lightweight conductor
The invention relates to a conductor (2) for electrical equipment, the conductor comprising at least one hollow section member (2) of electrically conductive...
US-9,941,079 Handle switch for vehicle
A handle switch for use on a vehicle includes a plurality of switches for operating electric devices on a vehicle. The handle switch is mounted on a switch case...
US-9,941,078 Touch and/or proximity-sensitive actuation element and domestic appliance having an actuation element
A touch and/or proximity-sensitive actuation element has an electrically non-conductive housing, which has a fastening portion for the stationary and...
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