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Patent # Description
US-9,966,240 Systems and methods for internal surface conditioning assessment in plasma processing equipment
In an embodiment, a plasma source includes a first electrode, configured for transfer of one or more plasma source gases through first perforations therein; an...
US-9,966,239 Non-ambipolar plasma enhanced DC/VHF phasor
This disclosure relates to a plasma processing system for controlling plasma density across a substrate and maintaining a tight ion energy distribution within...
US-9,966,238 Method for manufacturing semiconductor device, substrate processing apparatus and non-transitory...
Provided is a technique capable of suppressing a product substrate from being contaminated with a contaminant generated in a process chamber. The method...
US-9,966,237 System and method for differential etching
A plasma sputtering apparatus according to one embodiment includes a chamber and a reservoir in fluidic communication with the chamber. The reservoir stores a...
US-9,966,236 Powered grid for plasma chamber
A plasma processing chamber and methods for operating the chamber are provided. An exemplary chamber includes an electrostatic chuck for receiving a substrate...
US-9,966,234 Film forming device
A film forming device includes a cylindrical evaporation source, closing members, and an auxiliary electrode. The cylindrical evaporation source is configured...
US-9,966,233 Plasma processing apparatus
A plasma processing apparatus of exciting a processing gas into plasma by applying a high frequency power between an upper electrode and a lower electrode...
US-9,966,232 Ultra-high speed anisotropic reactive ion etching
A system and method for reactive ion etching (RIE) system of a material is provided. The system includes a plasma chamber comprising a plasma source and a gas...
US-9,966,231 Direct current pulsing plasma systems
A plasma processing system is provided that includes a chamber having a lower electrode coupled to a substrate support and an upper electrode coupled to ground....
US-9,966,230 Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer
A multi-column electron beam device includes an electron source comprising multiple field emitters fabricated on a surface of a silicon substrate. To prevent...
US-9,966,229 Supporting case and multi charged particle beam drawing apparatus
In one embodiment, a supporting case includes a lower case member and an upper case member. The mounting substrate is pinched between a lower cylindrical...
US-9,966,228 Multi charged particle beam apparatus, and shape adjustment method of multi charged particle beam image
A multi charged particle beam apparatus includes a forming aperture array substrate, where there are formed a plurality of first openings and a plurality of...
US-9,966,227 Specimen observation method and device using secondary emission electron and mirror electron detection
A technique capable of improving the ability to observe a specimen using an electron beam in an energy region which has not been conventionally given attention...
US-9,966,226 Cross-section processing and observation method and cross-section processing and observation apparatus
A cross-section processing and observation method performed by a cross-section processing and observation apparatus comprises a cross-section processing step of...
US-9,966,225 Charged particle beam device, simulation method, and simulation device
A simulation device calculates a detection number of electrons generated by charged particles radiated to a sample by a simulation and generates a simulation...
US-9,966,224 Quantitative secondary electron detection
Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology...
US-9,966,223 Device for correlative scanning transmission electron microscopy (STEM) and light microscopy
The invention relates to a device for correlative scanning transmission electron microscopy (STEM) and light microscopy. In order to create a device for...
US-9,966,222 Sample holder
A sample holder includes an adapter attached to an adapter attaching part. An analysis target, e.g., analytical cell, has first electrical connection members....
US-9,966,220 Electron energy loss spectrometer using direct detection sensor
An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor...
US-9,966,219 Electron energy loss spectrometer
An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube extending through the bending magnet and...
US-9,966,218 Electron beam device
The present invention provides an electron beam device that achieves high spatial resolution and high luminance, while remaining insusceptible to the effects of...
US-9,966,217 X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary...
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an...
US-9,966,216 Photo-electron source assembly with scaled nanostructures and nanoscale metallic photonic resonant cavity, and...
A new ultra-thin high-efficiency photoelectron source utilizing a metallic photonic resonant cavity having a photonic resonant cavity with a top metallic layer...
US-9,966,215 Permanent magnet operating device
The disclosure relates to a permanent magnet actuator comprising: a stator iron core having a space therein-side, and having a first wall and a second wall...
US-9,966,214 Electromagnetic relay
An electromagnetic relay includes a spool in which a coil is wound around its outer peripheral surface, and a magnetic core is inserted in its inside; a yoke...
US-9,966,213 Electronic device and manufacturing method therefor
An electronic device capable of reducing costs for equipment is shown. Of a plurality of housings each having an electromagnetic relay body incorporated...
US-9,966,212 Blinking device
The blinking device includes multiple power terminals, multiple load terminals, multiple contact switches, a control circuit, and multiple mounting substrates,...
US-9,966,211 Pressure switch system
A pressure switch including: a spring blade; a ram pin having an angled bottom surface and laterally restrained in movement, where upward movement of the ram...
US-9,966,210 Circuit breaker with integrated U-Link
A circuit interrupter having a moveable contact arm that forms part of the linkage assembly that connects to the handle. The moveable contact arm positioned...
US-9,966,209 Circuit breaker with arc shield
A circuit interrupter having a first contact positioned on a moveable contact arm that is moveable into and out of physical contact with a stationary contact....
US-9,966,208 Manual operation device for low voltage switching apparatus
The present invention discloses a manual operation device for low voltage switching apparatus. An operating handle is provided with a fixing groove. The fixing...
US-9,966,207 Motorized high voltage in-line disconnect switch with communication system controls
A high voltage in-line air break disconnect switch suspended by an electric power line conductor wherein the switch includes a rotating switch blade that is...
US-9,966,206 Circuit breakers with integrated safety, control, monitoring, and protection features
Methods, systems, and apparatus for circuit breakers with integrated safety, control, monitoring, and protection features. In one aspect, a circuit breaker...
US-9,966,205 Circuit breaker lockout system with tie-receiving channels
A lockout system for preventing a push-pull circuit breaker from being depressed while personnel work on de-energized electrical equipment. The lockout system...
US-9,966,204 Tape switch mounting bracket for firearm
The present invention relates to tape switch mounting bracket for use with a firearm comprising of a one-piece mounting bracket with at least two (2) parallel...
US-9,966,203 Method of determining an operational setting of an on-load tap changer
An operational setting of an on-load tap changer used to switch between various winding taps of a tapped transformer is determined by first placing the on-load...
US-9,966,202 Keyswitch, keyboard and keyswitch manufacturing method thereof
A keyswitch includes a cap, a support structure, a first magnet, and a baseplate having a bending arm protruding from the baseplate and a support rib extending...
US-9,966,201 Electrochemical cell
In an electrochemical cell including a cathode 7, an anode 6, electrolyte 10, a hollow container 1 accommodating these members, and terminals extending from the...
US-9,966,200 Electrolytic capacitor and manufacturing method therefor
An electrolytic capacitor includes a capacitor element, and a liquid solution with which the capacitor element is impregnated. The capacitor element includes:...
US-9,966,199 Supercapacitor having highly conductive graphene foam electrode
A supercapacitor electrode comprising a solid graphene foam impregnated with a liquid or gel electrolyte, wherein the solid graphene foam is composed of...
US-9,966,198 Solar cells with perovskite-based light sensitization layers
Solar cells are provided which comprise an electron transporting layer and a light sensitizing layer of perovskite disposed over the surface of the electron...
US-9,966,197 Energy storage devices including support filaments
A novel hybrid lithium-ion anode material based on coaxially coated Si shells on vertically aligned carbon nanofiber (CNF) arrays. The unique cup-stacking...
US-9,966,196 Tantalum embedded microchip
A solid electrolytic capacitor and method for making the capacitor are provided. The capacitor includes a sintered porous anode body; a sintered anode...
US-9,966,195 High quality, ultra-thin organic-inorganic hybrid perovskite
A layered perovskite structure comprising a substrate having an upper surface and a lower surface; and a layer of a perovskite film on the upper surface. A...
US-9,966,194 MEMS electrostatic actuator device for RF varactor applications
A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top...
US-9,966,193 Electric circuit device
An electric circuit device connecting first and second external elements, the electric circuit device including: a first electronic component; a first bus bar...
US-9,966,192 Plurality of capacitors electrically connected in parallel as a single physical unit
A plurality of parallel capacitors is constructed using an elongate common capacitor electrode with individual capacitors formed from individual capacitor...
US-9,966,191 Multilayer electronic component
A multilayer electronic component includes an element body having an internal electrode layer and a dielectric layer. These are substantially parallel to a...
US-9,966,190 Dielectric ceramic composition and multilayer ceramic capacitor
A dielectric ceramic composition has good characteristics even under the high electric field intensity, and particularly good IR characteristic and the high...
US-9,966,189 Monolithic ceramic electronic component
A method for manufacturing a monolithic ceramic electronic component includes the steps of preparing a first ceramic outer layer, stacking a plurality of inner...
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