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Patent # Description
US-9,984,880 Well and punch through stopper formation using conformal doping
A method for doping fins includes depositing a first dopant layer at a base of fins formed in a substrate, depositing a dielectric layer on the first dopant...
US-9,984,879 Silicon carbide semiconductor device and method for manufacturing same
A trench has first to third side surfaces respectively constituted of first to third semiconductor layers. A first side wall portion included in a first...
US-9,984,878 Resist under layer film composition and patterning process
The present invention provides a resist under layer film composition containing a novolak resin having a repeating unit shown by the formula (1), ##STR00001## ...
US-9,984,877 Fin patterns with varying spacing without fin cut
Methods of forming semiconductor fins include forming first spacers on a first sidewall of each of a plurality of mandrels using an angled deposition process. A...
US-9,984,876 Lithographic technique for feature cut by line-end shrink
A technique for patterning a workpiece such as an integrated circuit workpiece is provided. In an exemplary embodiment, the method includes receiving a dataset...
US-9,984,875 Film forming method
A method of forming a silicon film, a germanium film or a silicon germanium film on a target substrate having a fine recess formed on a surface of the target...
US-9,984,874 Method of producing transition metal dichalcogenide layer
Method of producing one or more transition metal dichalcogenide (MX.sub.2) layers on a substrate, comprising the steps of: obtaining a substrate having a...
US-9,984,873 Preparation of low defect density of III-V on Si for device fabrication
A method of forming a semiconducting material includes depositing a graded buffer on a substrate to form a graded layer of an indium (In) containing III-V...
US-9,984,872 Fabrication and structures of crystalline material
A surface of the first semiconductor crystalline material has a reduced roughness. A semiconductor device includes a low defect, strained second semiconductor...
US-9,984,871 Superlattice lateral bipolar junction transistor
A bipolar junction transistor includes an intrinsic base formed on a substrate. The intrinsic base includes a superlattice stack including a plurality of...
US-9,984,870 Combined reactive gas species for high-mobility channel passivation
A technique relates to in-situ cleaning of a high-mobility substrate. Alternating pulses of a metal precursor and exposure to a plasma of a gas or gas mixture...
US-9,984,869 Method of plasma-assisted cyclic deposition using ramp-down flow of reactant gas
A method is for forming a nitride or oxide film by plasma-assisted cyclic deposition, one cycle of which includes: feeding a first reactant, a second reactant,...
US-9,984,868 PEALD of films comprising silicon nitride
Provided are methods of for deposition of SiN films via PEALD processes. Certain methods pertain to exposing a substrate surface to a silicon precursor to...
US-9,984,867 Systems and methods for rinsing and drying substrates
In some embodiments, a system is provided that includes (1) a loading position; (2) a drying position; (3) a movable tank configured to (a) hold at least one...
US-9,984,866 Multiple zone heater
A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent...
US-9,984,865 Light-emitting sealed body
In a light-emitting sealed body, a metal structure (electron emission structure) containing an easily electron-emitting material is used, so that it is not...
US-9,984,864 Spatial zoom mode for accumulative trapped ion mobility spectrometry
The invention relates to the operation of ion mobility spectrometers based on gases pushing the ions over electrical field barriers, preferably in combination...
US-9,984,863 Multi-reflecting time-of-flight mass spectrometer with axial pulsed converter
Apparatuses and methods for time-of-flight mass spectrometry providing effective pulsed conversion of continuous ion beams into pulsed ion packets is disclosed....
US-9,984,862 Electrostatic mass spectrometer with encoded frequent pulses
A method, apparatus and algorithms are disclosed for operating an open electrostatic trap (E-trap) or a multi-pass TOF mass spectrometer with an extended flight...
US-9,984,861 Ion entry/exit device
A method of introducing and ejecting ions from an ion entry/exit device is disclosed. The ion entry/exit device has at least two arrays of electrodes. The...
US-9,984,860 Apparatus and method for augmenting the volume of atmospheric pressure plasma jets
An apparatus and methods to increase and direct the spatial volume of atmospheric pressure plasma jets. One or more additional gas flows is introduced to...
US-9,984,859 Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control...
An impedance matching circuit (IMC) is described. The impedance matching circuit includes a first circuit. The first circuit has an input coupled to a kilohertz...
US-9,984,858 ALE smoothness: in and outside semiconductor industry
Methods of etching and smoothening films by exposing to a halogen-containing plasma and an inert plasma within a bias window in cycles are provided. Methods are...
US-9,984,857 Plasma generation device
The subject matter of the instant invention is a plasma generation device in which at least one inductive device and at least one capacitive device are provided...
US-9,984,856 Ion implantation apparatus
An ion implantation apparatus performs a plurality of ion implantation processes having different implantation conditions to a same wafer successively. The...
US-9,984,855 Implementation of co-gases for germanium and boron ion implants
An ion implantation system for improving performance and extending lifetime of an ion source is disclosed. A fluorine-containing dopant gas source is introduced...
US-9,984,854 Ion beam processing method and ion beam processing apparatus
The present invention has an objective to provide a processing method and an ion beam processing apparatus capable of inhibiting deposition of redeposited films...
US-9,984,853 Method for generating writing data
A method for generating writing data to be input to a writing apparatus, which writes a figure pattern on a target object by using a charged particle beam,...
US-9,984,852 Time-of-flight charged particle spectroscopy
An apparatus for performing charged particle spectroscopy, comprising: A source, for producing a pulsed beam of charged particles that propagate along a beam...
US-9,984,851 Ion implanter, magnetic field measurement device, and ion implantation method
An ion implanter includes an energy analyzer electromagnet provided between an ion source and a processing chamber. The energy analyzer electromagnet includes a...
US-9,984,850 Microscopy support structures
Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and...
US-9,984,849 Electron beam splitter
The invention relates to an electron beam splitter (1) comprising a multi-pole electrode arrangement with a high-frequency alternating current voltage (5),...
US-9,984,848 Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens device
A multi-beam lens device is described, which includes: a first beam passage for a first charged particle beam formed along a first direction between a first...
US-9,984,847 Open-type X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same
An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray...
US-9,984,846 High brightness boron-containing electron beam emitters for use in a vacuum environment
An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 .mu.m or less. An electric field can be applied to the...
US-9,984,845 Circuit breaker with interference fit socket
A circuit breaker includes a housing, separable contacts, a trip mechanism, a first terminal, a second terminal, a first press fit connector, a second press fit...
US-9,984,844 Switch device and power supply control system
The switch device includes a control switch that turns on/off an electrical connection between an apparatus and the power supply, a condition judging circuit...
US-9,984,843 Method for detecting a latent failure mode in an electronic selector having an interface switch and at least...
A method for detecting a latent failure mode in an electronic selector having an interface switch and at least two underlying switches includes tracking and...
US-9,984,842 Electronic component assembly structure and electronic component
An electronic component including a component main body and a plurality of lead terminals is inserted and accommodated in a housing member, the lead terminals...
US-9,984,841 Wire release mechanism
A wire release mechanism includes two components with adjacent longitudinal fingers and a wire that is wound about the fingers. The wire restrains one of the...
US-9,984,840 Keyswitch structure, switch structure and method of assembling a keyswitch structure
A keyswitch structure includes a base, a keycap, a frame disposed between the base and the keycap for providing a supporting and moving mechanism to the keycap,...
US-9,984,839 Illuminated keyboard
The present invention provides an illuminated keyboard, including a light guide backplate and a plurality of keys connected to the light guide backplate. The...
US-9,984,838 Click pad
Examples disclosed herein relate to a click pad. Examples include a circuit board and a switch formed to extend from the circuit board. A stationary pad...
US-9,984,837 Multi configurable alarm station incorporating a push button assembly and assembly kit therefor
A kit incorporating a multi-configurable push-button subassembly for installing an emergency stop/deactivate alarm station which can be configured to operate in...
US-9,984,836 Actuator
An actuator is provided for creating an electrical contact between two tracks of a printed circuit board. The actuator includes a polymer part, forming an arm...
US-9,984,835 Impact absorbing unitary cover assembly
Apparatus and associated methods relate to a cover assembly having a plurality of ribs integrally formed within an actuator body envelope to increase the...
US-9,984,834 Keycap and manufacturing method thereof
A method of manufacturing keycaps, each keycap having a top and a skirt, includes: providing a first jig having a plurality of positioning units; arranging...
US-9,984,833 Switching system with preselector
The invention relates to a step switch, comprising a pre-selector and a fine selector. The invention is characterized in that the step switch has a connection...
US-9,984,832 Touch sensor and method for manufacturing the same
A touch sensor includes a hollow tubular member that is elastic and insulative; and a first electrode wire and a second electrode wire held in the tubular...
US-9,984,830 Variable capacitor and method for manufacturing the same
A variable capacitor, including: two movable plates, two poles, and one rotary shaft. The two movable plates are conductor belts, and the conductor belts are...
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