Easy To Use Patents Search & Patent Lawyer Directory

At Patents you can conduct a Patent Search, File a Patent Application, find a Patent Attorney, or search available technology through our Patent Exchange. Patents are available using simple keyword or date criteria. If you are looking to hire a patent attorney, you've come to the right place. Protect your idea and hire a patent lawyer.

Searching:





Search by keyword, patent number, inventor, assignee, city or state:




Patent # Description
US-9,991,129 Selective etching of amorphous silicon over epitaxial silicon
Systems and methods of etching a semiconductor substrate may include concurrent exposure of the semiconductor substrate to a chlorine-containing precursor and...
US-9,991,128 Atomic layer etching in continuous plasma
Methods and apparatus for etching substrates using self-limiting reactions based on removal energy thresholds determined by evaluating the material to be etched...
US-9,991,127 Method of fabricating integrated circuit device by using slurry composition
A method of fabricating an integrated circuit device may include forming a polishing stop layer and a semiconductor layer on a substrate, and selectively...
US-9,991,126 Semiconductor device including an electrically floated dummy contact plug and a method of manufacturing the same
A semiconductor device includes a substrate; a hydrogen insulating layer disposed on the substrate and including hydrogen ions; a first level layer disposed on...
US-9,991,125 Method for forming semiconductor device structure
A method for forming a semiconductor device structure is provided. The method includes forming a dielectric layer over a semiconductor substrate. The dielectric...
US-9,991,124 Metal gate and manufacturing method thereof
The present disclosure provides a semiconductor structure, including an active region with a first surface; an isolated region having a second surface,...
US-9,991,123 Doped protection layer for contact formation
A semiconductor device is provided. The semiconductor device includes a semiconductor substrate including a first doped region and a second doped region and a...
US-9,991,122 Methods of forming semiconductor device structures including two-dimensional material structures
A method of forming a semiconductor device structure comprises forming at least one 2D material over a substrate. The at least one 2D material is treated with...
US-9,991,121 Method of manufacturing semiconductor device
To improve accuracy and shielding capabilities of impurity implantation, a method of manufacturing a semiconductor device is provided, the method including...
US-9,991,120 Dilution doped integrated circuit resistors
A process for forming an integrated circuit with a dilution doped resistor with a resistance that may be tuned by partially blocking the implant used to dope...
US-9,991,119 Heat treatment method and heat treatment apparatus for semiconductor substrate
A heat treatment method for a semiconductor substrate is provided which improves the shapes of the sharp corners at the opening and the bottom of a trench...
US-9,991,118 Hybrid carbon hardmask for lateral hardmask recess reduction
Implementations of the present disclosure relate to improved hardmask materials and methods for patterning and etching of substrates. A plurality of hardmasks...
US-9,991,117 Fin patterns with varying spacing without fin cut
Methods of forming semiconductor fins include forming first spacers on a first sidewall of each of a plurality of mandrels using an angled deposition process. A...
US-9,991,116 Method for forming high aspect ratio patterning structure
The invention disclosed a method for forming high aspect ratio patterning structure. Firstly, forming a dielectric film ashing stop layer, a first photoresist...
US-9,991,115 Directed self-assembly using trench assisted chemoepitaxy
The present disclosure relates to directed self-assembly using trench assisted chemoepitaxy. An example embodiment includes a method of forming a pre-patterned...
US-9,991,114 Photolithographic patterning of electronic devices
A method of patterning a device includes forming a fluorinated photopolymer layer over a device substrate. The photopolymer layer has a lower portion proximate...
US-9,991,113 Systems and methods for fabricating single-crystalline diamond membranes
A buffer layer is employed to fabricate diamond membranes and allow reuse of diamond substrates. In this approach, diamond membranes are fabricated on the...
US-9,991,112 Method for forming dielectric film and method for fabricating semiconductor device
A method of forming a dielectric film includes providing a substrate in a chamber, and forming a silicon nitride film on the substrate using an atomic layer...
US-9,991,111 Apparatus and method of treating surface of semiconductor substrate
In one embodiment, an apparatus of treating a surface of a semiconductor substrate comprises a substrate holding and rotating unit, first to fourth supplying...
US-9,991,110 Method for manufacturing semiconductor wafer
A mirror-finishing chamfer polishing is applied using an abrasive-grain-free polishing solution to a chamfered portion of a semiconductor wafer having an oxide...
US-9,991,109 Apparatus for etching high aspect ratio features
Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments...
US-9,991,108 Ion guide with orthogonal sampling
A mass spectrometer is disclosed comprising a RF ion guide wherein in a mode of operation a continuous, quasi-continuous or pulsed beam of ions is orthogonally...
US-9,991,107 Methods of performing ion-ion reactions in mass spectrometry
A method is described that produces product ions for mass analysis, the method comprising the steps of: introducing precursor ions into an RF electric field ion...
US-9,991,106 Mass spectrometer with digital step attenuator
A method is disclosed comprising passing a signal output from a detector through a programmable attenuator or a programmable amplifier prior to digitizing the...
US-9,991,105 Active stabilization of ion trap radiofrequency potentials
Disclosed are improved methods and structures for actively stabilizing the oscillation frequency of a trapped ion by noninvasively sampling and rectifying the...
US-9,991,104 High dynamic range detector correction algorithm
Systems and methods are provided to perform dead time correction. An observed ion count rate is obtained using a non-paralyzable detection system of a mass...
US-9,991,103 Self-calibration of spectra using precursor mass to charge ratio and fragment mass to charge ratio known...
A method of checking or adjusting the calibration of a mass spectrometer is disclosed. The method comprises fragmenting parent or precursor ions and generating...
US-9,991,102 Sputtering apparatus, film deposition method, and control device
A sputtering apparatus according to one embodiment of the present invention includes a substrate holder, a cathode unit arranged at a position diagonally...
US-9,991,101 Magnetron assembly for physical vapor deposition chamber
Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a shunt plate having a central axis and...
US-9,991,100 Plasma processing apparatus and control method
The plasma processing apparatus includes a first electrode to which high frequency power is applied, a second electrode that functions as a counter electrode...
US-9,991,099 Filament holder for hot cathode PECVD source
A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor...
US-9,991,098 Toroidal plasma abatement apparatus and method
An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one...
US-9,991,097 Plasma processing apparatus
A plasma processing apparatus includes a chamber; a mounting table configured to mount thereon a target object in the chamber; a plasma source configured to...
US-9,991,096 Plasma processing apparatus
Provided is a plasma processing apparatus in which a variable inductor is installed in series with a variable condenser in a second power feeding unit that...
US-9,991,095 Ion source cleaning in semiconductor processing systems
Cleaning of an ion implantation system or components thereof, utilizing temperature and/or a reactive cleaning reagent enabling growth/etching of the cathode in...
US-9,991,094 Low energy electron microscopy
The disclosure relates to a low energy electron microscopy. The electron microscopy includes a vacuum chamber; an electron gun used to emit electron beam; a...
US-9,991,092 Scanning electron microscope and sample observation method
A scanning electron microscope of the present invention performs scanning by changing a scanning line density in accordance with a sample when an image of a...
US-9,991,091 Optical column for focused ion beam workstation
An in-situ optical column comprises: a hollow objective tube; a microscope objective including an outermost lens, the microscope objective inserted at least...
US-9,991,090 Dual laser beam system used with an electron microscope and FIB
The present invention discloses an electron microscope and FIB system for processing and imaging of a variety of materials using two separate laser beams of...
US-9,991,089 Particle beam system and method for operating a particle optical unit
A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a...
US-9,991,088 Charged particle beam device and aberration corrector
An aberration corrector includes a mirror that corrects an aberration of a charged particle beam, a beam separator, and a bypass optical system in the beam...
US-9,991,087 Spectroscopy in a transmission charged-particle microscope
An imaging system for directing a flux of charged particles transmitted through a specimen onto a spectroscopic apparatus, wherein the flux is dispersed by a...
US-9,991,086 Multi charged particle beam writing method and multi charged particle beam writing apparatus
In one embodiment, a multi charged particle beam writing method includes performing blanking deflection on each of multiple beams using a plurality of...
US-9,991,085 Apparatuses and methods for generating distributed x-rays in a scanning manner
An apparatus and method to generate distributed x-rays. A hot cathode of an electron gun is used in vacuum to generate electron beams having certain initial...
US-9,991,084 Continuous contact x-ray source
An x-ray device utilizes a band of material to exchange charge through tribocharging within a chamber maintained at low fluid pressure. The charge is utilized...
US-9,991,083 Magnetron cooling fin and magnetron having the same
A magnetron cooling fin has a flat plate shape in which one or a plurality of corrugated regions are formed in a body of the magnetron cooling fin to improve...
US-9,991,082 Semiconductor device and related manufacturing method
A semiconductor device may include the following elements: a semiconductor substrate, an insulator positioned on the substrate, a source electrode positioned on...
US-9,991,081 Electron emitting device using graphene and method for manufacturing same
Disclosed are an electron emitting device using graphene and a method for manufacturing the same. The electron emitting device includes a metal holder having at...
US-9,991,079 Circuit breaker for an electrical circuit
A circuit breaker is disclosed, including a series circuit including a measuring unit for determining the electrical current or/and voltage of the electrical...
US-9,991,078 Short-current protection action current adjusting method and device thereof and device for multi-pole...
A short-circuit protection action current adjusting method and a device thereof for a multi-pole electromagnetic release. An electromagnetic system includes an...
← Previous | 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 | Next →

File A Patent Application

  • Protect your idea -- Don't let someone else file first. Learn more.

  • 3 Easy Steps -- Complete Form, application Review, and File. See our process.

  • Attorney Review -- Have your application reviewed by a Patent Attorney. See what's included.