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Patent # Description
US-1,002,0200 Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays
Methods and systems for direct atomic layer etching and deposition on or in a substrate using charged particle beams. Electrostatically-deflected charged...
US-1,002,0199 Porous tin oxide films
Initial film layers prepared from tin(II) chloride spontaneously generate open cavities when the initial film layers are thermally cured to about 400.degree. C....
US-1,002,0198 Semiconductor structure having low-k spacer and method of manufacturing the same
The present disclosure provides a semiconductor structure, including a semiconductor fin, a metal gate over the semiconductor fin, and a sidewall spacer...
US-1,002,0197 Method for reducing porogen accumulation from a UV-cure chamber
Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through...
US-1,002,0196 Methods of forming etch masks for sub-resolution substrate patterning
Techniques disclosed herein provide a method and fabrication structure for pitch reduction for creating high-resolution features and also for cutting on pitch...
US-1,002,0195 Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant...
The disclosure herein describes methods for Photosensitized Chemically Amplified Resist Chemicals (PS-CAR) to pattern light sensitive films (e.g., photoresist...
US-1,002,0194 Laser annealing device, production process of polycrystalline silicon thin film, and polycrystalline silicon...
The invention relates to the field of laser annealing, and discloses a laser annealing device, a production process of a polycrystalline silicon thin film, and...
US-1,002,0193 Method for laser annealing with laser beam radiated via through hole
A laser annealing method that includes forming a second layer having through holes on a first layer, and radiating laser light with a wavelength of 3 .mu.m or...
US-1,002,0192 Method for forming polysilicon
A method for forming polysilicon on a semiconductor substrate that include providing amorphous silicon on a semiconductor substrate, exposing at least an area...
US-1,002,0191 Method for characterizing carbon nanotubes by using scanning electron microscope
A method for characterizing carbon nanotubes comprising: providing a conductive substrate and applying an insulating layer on the conductive substrate; forming...
US-1,002,0190 Nano-heterostructure
The present disclosure relates to a nano-heterostructure. The nano-heterostructure includes a semiconductor layer, a first metallic carbon nanotube, a...
US-1,002,0189 Growing a III-V layer on silicon using aligned nano-scale patterns
A method of forming an integrated circuit structure includes providing a wafer having a silicon substrate; forming a plurality of shallow trench isolation (STI)...
US-1,002,0188 Method for depositing ALD films using halide-based precursors
A method of depositing ALD films on semiconductor substrates processed in a micro-volume of a plasma enhanced atomic layer deposition (PEALD) reaction chamber...
US-1,002,0187 Apparatus and methods for backside passivation
Provided apparatus and methods for back side passivation of a substrate. The systems comprise an elongate support with an open top surface forming a support...
US-1,002,0186 Silicon germanium selective oxidation process
Implementations described herein relate to selective oxidation processes for semiconductor device manufacturing. In one implementation, the process includes...
US-1,002,0185 Composition for forming silica layer, silica layer, and electronic device
A composition for forming a silica layer including a silicon-containing polymer having a weight average molecular weight of about 20,000 to about 70,000 and a...
US-1,002,0184 Method for cleaning substrate
A method for cleaning a substrate is provided. The method includes providing a substrate. Metal compound residues are formed over the substrate. The method...
US-1,002,0183 Edge roughness reduction
A method for processing a stack with an etch layer below a mask is provided. The mask is treated by flowing a treatment gas, wherein the treatment gas comprises...
US-1,002,0182 Digital wireless data collection
The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes...
US-1,002,0181 Time-of-flight mass spectrometer
An ion transport optical system is disposed between a collision cell and an orthogonal acceleration unit. When releasing ions that are held in the collision...
US-1,002,0180 Modular ion generator device
The present invention provides methods and systems for a modular ion generator device that includes a bottom portion, two opposed side portions, a front end, a...
US-1,002,0179 Focusing ion guiding apparatus and mass spectrographic analysis apparatus
A focusing ion guiding apparatus includes: at least one ion guiding inlet and ion guiding outlet connected to each other via a transport axial line; at least...
US-1,002,0178 System and method for matrix-coating samples for mass spectrometry
Disclosed herein are embodiments of a system and method for preparing matrix-coated samples for analysis using mass spectrometry. In particular disclosed...
US-1,002,0177 Piezo-electric vibration on an in-source surface ionization structure to aid secondary droplet reduction
An ion source is disclosed comprising a nebulizer and a target. The nebulizer is arranged and adapted to emit, in use, a stream of analyte droplets which are...
US-1,002,0176 Surface extraction interface
Surface extraction interface systems can include a seal assembly with a cavity assembly, an actuator, and a force gauge. Methods of preparing a sample for...
US-1,002,0175 Multiple oil-emission measuring device for engines
A multiple oil-emission device for hydrocarbon emissions in an exhaust-gas mixture, comprising an exhaust-gas probe, which has a transfer capillary, and a...
US-1,002,0174 Methods and devices for parallel analysis of ion mobility spectrum and mass spectrum
A method for parallel analysis in mass spectrometry and ion mobility spectrometry includes enabling a sample to be subjected to a chromatography separation;...
US-1,002,0173 Chromatograph mass analysis data processing apparatus
A chromatograph mass analysis data processing method for obtaining pertinent information on a compound series including a plurality of compounds whose...
US-1,002,0172 Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the...
There is provided a plasma processing apparatus including a susceptor, having a substrate mounting portion for mounting thereon a substrate; a focus ring...
US-1,002,0170 Chemistry compatible coating material for advanced device on-wafer particle performance
A method includes feeding powder comprising a yttrium oxide into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles,...
US-1,002,0169 Etching device and etching method
An etching device and an etching method. The etching device includes an etching chamber and a chuck located therein for clamping a substrate to be etched, a...
US-1,002,0168 Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in...
Systems and methods for tuning a radio frequency (RF) generator are described. One of the methods includes supplying, by a high frequency RF generator, a high...
US-1,002,0167 Plasma processing apparatus
A plasma processing apparatus includes: a processing chamber; a substrate holding unit; a processing gas supply unit; a RF antenna having an inner antenna coil...
US-1,002,0166 Alignment and registration targets for charged particle beam substrate patterning and inspection
The present application discloses methods, systems and devices for using charged particle beam tools to pattern and inspect a substrate. The inventors have...
US-1,002,0165 Multi charged particle beam writing method, and multi charged particle beam writing apparatus
A multi charged particle beam writing method includes calculating an offset dose to irradiate all the small regions by multiplying one beam dose equivalent to a...
US-1,002,0164 Charged particle beam apparatus
The present invention provides apparatuses to inspect small particles on the surface of a sample such as wafer and mask. The apparatuses provide both high...
US-1,002,0163 Charged particle beam apparatus, specimen observation system and operation program
For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation...
US-1,002,0162 Beam alignment method and electron microscope
There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with...
US-1,002,0161 Charged particle system and methods for irradiating a planning target volume
A method for irradiating a planning target volume with charged particles includes delivering the charged particles to the planning target volume with a charged...
US-1,002,0160 Charged particle beam device
An object of the present invention is to provide a charged particle beam device which can realize improved contrast of an elongated pattern in a specific...
US-1,002,0159 Multi charged particle beam writing method and multi charged particle beam writing apparatus
A multi charged particle beam writing method includes performing ON/OFF switching of a beam by an individual blanking system for the beam concerned, for each...
US-1,002,0158 Transmitting-type target and X-ray generation tube provided with transmitting-type target
A transmissive-type target includes a target layer, and a transmissive substrate configured to support the target layer. The transmissive substrate has a pair...
US-1,002,0157 X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary...
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an...
US-1,002,0156 Resonant enhancement of photoionization of gaseous atoms
A system and method for using a high-performance photoionization subsystem are disclosed. Embodiments of the present disclosure employ narrow bandwidth laser...
US-1,002,0155 Electrical switching apparatus comprising a switching mechanism and at least one auxiliary module
This electrical switching apparatus includes a protection casing, at least one switching member suitable for switching between a first position permitting the...
US-1,002,0154 Trip bar stop
An operating mechanism including a number of biasing elements and a number of linkage members is provided. The linkage members are operatively coupled to each...
US-1,002,0153 Method for determining a cause of a voltage outage load-side from a circuit breaker, auxiliary unit for a...
In this method, the voltage outage load-side is an opening of the circuit breaker, and the circuit breaker is able to interrupt the flow of electric current in...
US-1,002,0152 Plug-on neutral connection
A plug-on neutral circuit breaker includes a housing, a neutral terminal, and a biasing member. The neutral terminal is pivotally coupled to the housing and...
US-1,002,0151 Safety relay configuration system with multiple test pulse schemes using graphical interface
A safety relay configuration system for configuring safety functions to be carried out by a safety relay is provided. The configuration system comprises a...
US-1,002,0150 Method for operating an electromotive adjusting device, and electromotive adjusting device
A method operates an electromotive adjusting device of a motor vehicle. The adjusting device contains a relay which has two contacts. The relay is switched by...
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