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Patent # Description
US-1,013,3197 Lithographic apparatus and device manufacturing method
A lithographic apparatus including: a projection system with an optical axis; an enclosure with an ambient gas; and a physical component accommodated in the...
US-1,013,3196 Apparatus for cleaning an object
An apparatus for cleaning an object, the apparatus including: an object support for supporting the object; a low pressure chamber for exposing a first surface...
US-1,013,3195 Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus,...
An exposure apparatus exposes a substrate with illumination light via a projection optical system, and includes a frame member, a mark detection system that...
US-1,013,3194 Movable body apparatus, exposure apparatus, and device manufacturing method
A stage device is equipped with a surface plate and a wafer stage which is mounted on the surface plate and has an exhausting port formed on a surface facing...
US-1,013,3193 Piecewise alignment modeling method
Embodiments disclosed herein generally relate to adjusting exposure parameters of a substrate in response to an overlay error. The method includes partitioning...
US-1,013,3192 Method and apparatus for determining the property of a structure, device manufacturing method
A structure of interest (T) is irradiated with radiation for example in the x-ray or EUV waveband, and scattered radiation is detected by a detector (19, 274,...
US-1,013,3191 Method for determining a process window for a lithographic process, associated apparatuses and a computer program
A method of determining a process window for a lithographic process, the process window describing a degree of acceptable variation in at least one processing...
US-1,013,3190 Fluid handling structure, a lithographic apparatus and a device manufacturing method
A fluid handling structure for a lithographic apparatus, the fluid handling structure having, at a boundary from a space configured to contain immersion fluid...
US-1,013,3189 Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and...
A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate by exposure light via a first liquid between an emitting...
US-1,013,3188 Metrology method, target and substrate
A method, involving illuminating at least a first periodic structure of a metrology target with a first radiation beam having a first polarization, illuminating...
US-1,013,3187 Light irradiation apparatus and drawing apparatus
A light irradiation apparatus (31) includes a light source unit (40) and an irradiation optical system (5). In the light source unit, light source parts (4)...
US-1,013,3186 Method and apparatus for aligning substrates on a substrate support unit
An alignment apparatus for aligning a substrate, and a substrate processing system including such alignment apparatus. The alignment apparatus includes an...
US-1,013,3185 Illumination optical apparatus and device manufacturing method
Provided is an illumination optical apparatus for illuminating a mask with light from a light source. The apparatus includes an optical integrator configured to...
US-1,013,3184 Using customized lens pupil optimization to enhance lithographic imaging in a source-mask optimization scheme
A process for use in configuring a projection optics lithography system comprising providing a determination of pupil amplitude and phase optimization for the...
US-1,013,3183 Optical component
An optical component for a projection exposure apparatus includes a multiplicity of variably positionable beam-guiding elements which serve as pupil facets. The...
US-1,013,3182 Illumination optical assembly for a projection exposure apparatus
An illumination optical assembly for a projection exposure apparatus includes a first facet element having a multiplicity of first facets, which are formed in...
US-1,013,3181 Electron source
An electron source is formed on a silicon substrate having opposing first and second surfaces. At least one field emitter is prepared on the second surface of...
US-1,013,3180 Microelectronic substrate cleaning compositions having copper/azole polymer inhibition
Semi-aqueous, alkaline microelectronic cleaning composition of pH .gtoreq.8 containing: (A) at least one secondary alkanolamine that generates hydroxides when...
US-1,013,3179 Pattern treatment methods
A pattern treatment method, comprising: (a) providing a semiconductor substrate comprising a patterned feature on a surface thereof; (b) applying a pattern...
US-1,013,3178 Coating liquid for resist pattern coating
There is provided a new coating liquid for resist pattern coating. A coating liquid for resist pattern coating comprising a component A that is a polymer...
US-1,013,3177 Exposure apparatus, exposure method, and article manufacturing method
An exposure method of exposing a plurality of exposure regions on a substrate includes the steps of acquiring first reference information indicating a reference...
US-1,013,3176 Hardmask composition and method of forming pattern using the same
A hardmask composition includes a plurality of graphene nanosheets doped with boron (B) and/or nitrogen (N) and a solvent. A size of the graphene nanosheet may...
US-1,013,3175 Photosensitive resin composition, cured product and method for producing same, method for producing resin...
Provided are a photosensitive resin composition from which a cured product having a thin film thickness, excellent light-shielding properties, and a high...
US-1,013,3174 Liquid photoreactive composition and method of fabricating structures
A method of fabricating a structure includes disposing a liquid photoreactive composition on a substrate, exposing a portion of the liquid photoreactive...
US-1,013,3173 Processing fluid supply device, substrate processing device, processing fluid supply method, substrate...
A processing liquid supplying apparatus is arranged to discharge a processing liquid from a discharge port to supply the processing liquid to a processing...
US-1,013,3172 Lens module and projector using the same
A lens module includes a lens, a first gravity sensor and a processor. The lens includes an optical axis and an adjustment assembly. The adjustment assembly...
US-1,013,3171 Augmenting physical appearance using illumination
A system for augmenting the appearance of an object including a plurality of projectors. Each projector includes a light source and a lens in optical...
US-1,013,3170 Air conditioner and method for controlling the same
An air conditioner having a projector and a method for controlling the same output an image to a display plate of the air conditioner and to the periphery of...
US-1,013,3169 Light source optical system and projection display apparatus employing the same
A light source optical system includes a micro lens array, a condenser lens unit, and a dichroic surface. In a direction orthogonal to an optical axis in a...
US-1,013,3168 Compact light projection system including an anamorphic reflector assembly
A compact light projection system. The light projection system includes a light source, an anamorphic reflector assembly, and a correction element that is...
US-1,013,3167 Projection apparatus and light source module
A projection apparatus and a light source module are provided. The light source module includes a light-emitting element string, a shunt module, and a control...
US-1,013,3166 Light source unit including a light source with multiple light emitting elements, different numbers of which...
A light source unit has a first light source for emitting light in a first wavelength range, a second light source for emitting light in a second wavelength...
US-1,013,3165 Optical device
According to the present invention, there is provided an optical device comprising, a plurality of light sources each operable to provide a light beam; at least...
US-1,013,3164 Projection display apparatus for improving the chromaticity of blue light
A projection display apparatus of the present disclosure includes a solid state light source that emits blue light in a first wavelength range; a wheel having a...
US-1,013,3163 Light source unit and optical engine
A light source unit, includes: a semiconductor laser device that emits laser light; a wheel substrate that has a light entering surface and a light exiting...
US-1,013,3162 Projection display apparatus including eye tracker
A projection display apparatus that tracks a user's eye with an eye tracker and displays a high-resolution image at a position of the user's eye. The projection...
US-1,013,3161 Projection display device
A projection display device includes a first substrate on which a red light source is mounted, a second substrate on which a green light source is mounted, a...
US-1,013,3160 Projector unit for portable information devices
A portable information device having a projector unit is disclosed. The projector unit includes a chassis, a connection terminal part and a projector part. The...
US-1,013,3158 Imaging device
An electronic device includes: an electronic part; an external case that covers the electronic part and constitutes an exterior; and a heat dissipation frame...
US-1,013,3157 Imaging control device, imaging system, imaging control method, and recording medium
An imaging control device includes a first communication module, a second communication module, and a generation unit. The first communication module receives...
US-1,013,3156 Fused opaque and clear glass for camera or display window
Apparatus, systems and methods for windows integration with cover glass and for processing cover glass to provide windows for electronic devices are disclosed....
US-1,013,3155 Imaging device
There is provided an imaging device that includes a body and a viewfinder. The viewfinder is movable in two or more directions, between an encased position and...
US-1,013,3154 Motorized security door for electronic communication devices
A motorized shutter for a host communication device configured as a single or multipart shutter positioned over a lens of a host camera. The shutter is opened...
US-1,013,3153 Self-damping shutter apparatus for exposure system of photolithography machine
A self-damping shutter apparatus for use in an exposure system of a photolithography machine, comprising: at least two pieces of shutter blades (1) for cutting...
US-1,013,3152 Camera module and camera device
Disclosed is a camera module capable of overcoming a design limitation on a structure for auto-focusing and handshake compensation attributable to the thickness...
US-1,013,3151 Media-defined optical logic circuitry design
A media-defined optical logic circuit composed of a set of light-transmitting polyhedral prisms arranged so that a pair of adjacent prisms can exchange photonic...
US-1,013,3150 Optical parametric ultrashort pulse amplifier
An optical parametric amplification device, including: an emitter emitting non-monochromatic light pulses as a pump wave; a stretcher configured to receive as...
US-1,013,3149 Apparatus and methods for generating nonlinear effects in centrosymmetric materials
A waveguide includes an array of p-i-n junctions formed by ions implanted into the waveguide. The p-i-n junctions concentrate electric fields applied on the...
US-1,013,3148 Nonlinear optical material and methods of fabrication
Disclosed is a nonlinear optical material (NLO) for use in deep-UV applications, and methods of fabrication thereof. The NLO is fabricated from a plurality of...
US-1,013,3147 Scalable source of quantum entangled photons
The present invention provides devices, systems, and methods for producing bi-photons and/or entangled photons without the need for complex alignment or source...
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