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United States Patent D770,992
Tauchi ,   et al. November 8, 2016

Electrode cover for a plasma processing apparatus

Claims


CLAIM The ornamental design for an electrode cover for a plasma processing apparatus, as shown and described.
Inventors: Tauchi; Susumu (Tokyo, JP), Uemura; Takashi (Tokyo, JP), Sato; Kohei (Tokyo, JP)
Applicant:
Name City State Country Type

Hitachi High-Technologies Corporation

Minato-ku, Tokyo

N/A

JP
Assignee: Hitachi High-Technologies Corporation (Tokyo, JP)
Appl. No.: D/544,070
Filed: October 30, 2015

Foreign Application Priority Data

Jun 12, 2015 [JP] 2015-013037

Current U.S. Class: D13/182
Current International Class: 1303
Field of Search: ;D13/158-177,182,184 ;204/286.1,297.1 ;205/118,123 ;200/1R,5R,52R,315,310,6A,302.1,308,314,317,11R,16B

References Cited [Referenced By]

U.S. Patent Documents
D404370 January 1999 Kimura
D404372 January 1999 Ishii
D427570 July 2000 Ishii
6495007 December 2002 Wang
6663762 December 2003 Bleck
D494551 August 2004 Doba
D494552 August 2004 Tezuka
6843894 January 2005 Berner
6908540 June 2005 Kholodenko
7025862 April 2006 Herchen
7087144 August 2006 Herchen
7138039 November 2006 Burkhart
D557226 December 2007 Uchino
D559993 January 2008 Nagakubo et al.
D559994 January 2008 Nagakubo et al.
D699200 February 2014 Nagakubo
D709536 July 2014 Yoshimura et al.
D709538 July 2014 Mizukami
D709539 July 2014 Kuwabara et al.
Foreign Patent Documents
D1184862 Sep 2003 JP
D1208795 Jun 2004 JP
D1210214 Jun 2004 JP
D1267920 Apr 2006 JP
D1438663 Apr 2012 JP
D1444749 Jun 2012 JP
D1444992 Jun 2012 JP
Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Crowell & Moring LLP

Description



FIG. 1 is a front, top and right side enlarged perspective view of an electrode cover for a plasma processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6; and,

FIG. 9 is an enlarged portion view taken along line 9-9 of FIG. 8.

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