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United States Patent D802,790
Tauchi ,   et al. November 14, 2017

Cover ring for a plasma processing apparatus

Claims


CLAIM The ornamental design for a cover ring for a plasma processing apparatus, as shown and described.
Inventors: Tauchi; Susumu (Tokyo, JP), Uemura; Takashi (Tokyo, JP), Sato; Kohei (Tokyo, JP)
Applicant:
Name City State Country Type

Hitachi High-Technologies Corporation

Minato-ku, Tokyo

N/A

JP
Assignee: Hitachi High-Technologies Corporation (Tokyo, JP)
Appl. No.: D/544,069
Filed: October 30, 2015

Foreign Application Priority Data

Jun 12, 2015 [JP] 2015-013036

Current U.S. Class: D24/232; D13/182
Current International Class: 2401
Field of Search: ;D24/169,186,216,231,232 ;D13/122,138,144,182,199,158-177 ;D15/144,144.1,199,138,133

References Cited [Referenced By]

U.S. Patent Documents
D404369 January 1999 Kawachi
D404370 January 1999 Kimura
D404372 January 1999 Ishii
6423175 July 2002 Huang
D491963 June 2004 Doba
7186171 March 2007 Oh
D556704 December 2007 Nakamura
D557226 December 2007 Uchino
D557425 December 2007 Nakamura
D559993 January 2008 Nagakubo
D559994 January 2008 Nagakubo
D638550 May 2011 Bedingham
D638951 May 2011 Bedingham
D658691 May 2012 Suzuki
D658693 May 2012 Suzuki
D667561 September 2012 Bedingham
8298046 October 2012 Frank, Jr.
D699200 February 2014 Nagakubo
D703160 April 2014 Tanimura
D716239 October 2014 Lau
D716240 October 2014 Lau
D717746 November 2014 Lau
D766849 September 2016 Fukushima
D770992 November 2016 Tauchi
2003/0066484 April 2003 Morikage
2005/0150452 July 2005 Sen
2005/0258280 November 2005 Goto
2008/0041820 February 2008 Tong
2008/0121620 May 2008 Guo
Foreign Patent Documents
1052359 Oct 1999 JP
1267921 Apr 2006 JP
Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Crowell & Moring LLP

Description



FIG. 1 is a front, top and right side perspective view of a cover ring for a plasma processing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6; and,

FIG. 9 is an enlarged portion view taken along line 9-9 of FIG. 8.

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